Performance verification of a 4-axis focus variation coordinate measuring system

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Moroni, Giovanni, Syam, Wahyudin P. and Petrò, Stefano (2016) Performance verification of a 4-axis focus variation coordinate measuring system. IEEE Transactions on Instrumentation and Measurement . pp. 1-9. ISSN 0018-9456

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Abstract

Performance verification of a coordinate measuring system (CMS) is important for instrument acceptance, reverification, comparability as well as measurement traceability to the definition of the meter. State-of-the-art ISO 10360 standard series is the reference text about the procedure of verification for CMS. Specifically, ISO 10360-8 considers optical distance sensor based CMSs. This article proposes procedures and artifacts for performance verification of focus variation-based CMS for a simultaneous 4-axis measuring mode. The proposal is inspired by, but goes beyond, the ISO 10360 standard, proposing an original solution for simultaneous linear and rotational axes verification.

Item Type: Article
RIS ID: https://nottingham-repository.worktribe.com/output/822438
Additional Information: c2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
Keywords: Performance Evaluation, ISO 10360 standards, Coordinate Measuring Systems, Focus Variation Microscopy
Schools/Departments: University of Nottingham, UK > Faculty of Engineering
Identification Number: 10.1109/TIM.2016.2614753
Depositing User: Eprints, Support
Date Deposited: 11 Nov 2016 14:44
Last Modified: 04 May 2020 18:16
URI: https://eprints.nottingham.ac.uk/id/eprint/38686

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