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Feng, Xiaobing, Quagliotti, Danilo, Maculotti, Giacomo, Syam, Wahyudin P., Tosello, Guido, Hansen, Hans N., Galetto, Maurizio and Leach, Richard (2017) Measurement noise of a point autofocus surface topography instrument. In: 16th Conference on Metrology and properties of Engineering Surfaces, 27-29 June 2017, Göteborg, Sweden.

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