An investigation on thermoelastic damping of high-Q ring resonators

Hossain, Syed T., McWilliam, Stewart and Popov, Atanas A. (2016) An investigation on thermoelastic damping of high-Q ring resonators. International Journal of Mechanical Sciences, 106 . pp. 209-219. ISSN 0020-7403

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For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality factors (Q). This paper considers ring resonator based rate sensors and investigates the influence of design changes to the ring and support legs on thermoelastic damping, which is the dominant dissipation mechanism. A computational method is used to quantify the thermoelastic damping and a detailed parameter study is conducted to understand the influence of ring geometry, support legs and micro-machined slots around the ring circumference. The results show that damping in the support legs can have significant influence on the total energy dissipated from the resonator, and the optimum leg geometry can be identified to achieve high Q. It is also observed that the addition of slots improves Q for resonators having higher energy loss. However, for high-Q, rings slots have a detrimental effect. The results presented are useful for designing ring resonators with reduced levels of damping.

Item Type: Article
Keywords: Thermoelastic damping; Ring resonator; Rate gyro; Quality factor; MEMS device
Schools/Departments: University of Nottingham, UK > Faculty of Engineering
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Depositing User: Eprints, Support
Date Deposited: 18 Sep 2017 15:06
Last Modified: 04 May 2020 20:04

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