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Claverley, James David (2014) Development and validation of a 3D vibrating contact probe for micro-CMMs. PhD thesis, University of Nottingham.

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Abstract

The state-of-the-art in dimensional metrology in terms of accuracy and 3D measurement is the micro-co-ordinate measuring machine, or micro-CMM. Current manufacturing trends are inclined towards miniaturisation, and all developments in this area are dependent on the capabilities of dimensional metrologists. Currently, the main limiting factor in the advancement of co-ordinate metrology at the micrometre scale is the design, manufacture and resulting accuracy of contacting micro-CMM probes. With this in mind, this thesis describes the development of a novel 3D vibrating micro-CMM probe. The main contributions of this thesis are as follows.

Firstly, the current state of contact probing at the micrometre scale is reviewed and a clear set of knowledge gaps are identied for developments in this area.

Secondly, the concept of a novel 3D vibrating micro-CMM probe is introduced as the background knowledge for this thesis. The mechanical and electrical properties of this vibrating micro-probe are modelled, as well as its intended operation. The operational model of the vibrating microprobe

focusses on the surface interaction forces that are prevalent when probing at the micrometre scale.

Thirdly, the operation of the vibrating micro-probe is validated experimentally. Initially, the ability of the vibrating micro-probe to counteract the surface interaction forces is investigated. Other areas of validation are in the determination of the probing point repeatability, the linearity error, and isotropy of the probe.

Finally, the intended operation of the probe is compared to current national and international specication standards and guidelines for the operation of CMM probes. This work is directly aimed at ensuring that the developed vibrating micro-probe is capable of operating in an industrial

or commercial metrology environment. A detailed set of operating strategies are also developed for ecient use of the vibrating micro-probe.

It is concluded that the developed vibrating micro-probe will be able to address the current needs of the micro-CMM community. It is also concluded that the vibrating micro-probe has the ability to operate in a non-contact mode, further increasing its usefulness.

Item Type:	Thesis (University of Nottingham only) (PhD)
Supervisors:	Ratchev, S.M. Segal, J.I. Leach, R.
Keywords:	Coordinate measuring machines, microtechnology
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Faculties/Schools:	UK Campuses > Faculty of Engineering > Department of Mechanical, Materials and Manufacturing Engineering
Item ID:	14283
Depositing User:	EP, Services
Date Deposited:	08 Oct 2014 13:12
Last Modified:	19 Oct 2017 12:20
URI:	https://eprints.nottingham.ac.uk/id/eprint/14283

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