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Fay, Mike W. and Moldovan, Grigore and Harrison, Ian and Balmer, R.S. and Soley, D.E.J. and Hilton, K.P. and Hughes, B.T. and Uren, M.J. and Martin, T. and Brown, Paul D. (2003) TEM studies of multilayer ohmic contacts to n-type AlGaN/GaN. In: Microscopy of semiconducting materials 2003: proceedings of the Institute of Physics conference, Cambridge University, 31 March - 3 April. Institute of Physics conference series (180). IOP Publishing Ltd, Bristol, pp. 483-486. ISBN 9780750309790