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Maclean, Jessica O. and Hodson, Jonathan R. and Voisey, K.T. (2015) Laser drilling of via micro-holes in single-crystal semiconductor substrates using a 1070 nm fibre laser with millisecond pulse widths. Proceedings of SPIE. Industrial Laser Applications Symposium (ILAS 2015), 9657 (965701). ISSN 0277-786X