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Article

Ekberg, Peter, Su, Rong and Leach, Richard K. (2017) High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface. Optics Express, 25 (16). pp. 18703-18712. ISSN 1094-4087

Conference or Workshop Item

Su, Rong, Ekberg, Peter and Leach, Richard K. (2017) High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface. In: 2017 ASPE Topical Meeting: Precision Engineering and Optics: What are the limits of precision, and how to characterize them?, 24-25 April 2017, Tuscon, Arizona, USA.

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