Browse by Authors and Editors
Jump to: Article | Conference or Workshop Item Number of items: 2. ArticleEkberg, Peter, Su, Rong and Leach, Richard K. (2017) High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface. Optics Express, 25 (16). pp. 18703-18712. ISSN 1094-4087 Conference or Workshop ItemSu, Rong, Ekberg, Peter and Leach, Richard K. (2017) High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface. In: 2017 ASPE Topical Meeting: Precision Engineering and Optics: What are the limits of precision, and how to characterize them?, 24-25 April 2017, Tuscon, Arizona, USA. |
