Development of an improved Scott-Russell compliant spatial nano-positioning stage based on work-enrgy method

Taha, Samah Abdelseed (2019) Development of an improved Scott-Russell compliant spatial nano-positioning stage based on work-enrgy method. PhD thesis, University of Nottingham.

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Abstract

Recently, there are fast advances in certain applications, such as optical alignment systems, stereotaxic instruments in microsurgery and nano-manufacturing, which require three degree-of-freedom spatial positioning stages to perform out-of-horizontal-plane motions. However, the research in this area is limited due to the structural complexity of the spatial compliant positioning stages, which leads to difficulty of modelling and controller design. By contrast, most of the research works focus on the traditional planar stages, which are characterized by their comparatively simple design and modelling features. Hence, the design of compact-sized spatial compliant positioning systems with high performance and accuracy are greatly required.

Therefore, this research work aims to design a spatial nano-positioning stage with high flexibility and performance. To achieve this aim, the research focuses on two issues. The first one is the structural design to improve the flexibility of the stage in terms of totally isolating the motions of the actuating units. The high flexibility is reached by adopting a monolithic structure based on a compliant Scott-Russell amplification mechanism for the actuating unit, which is driven by a piezoelectric actuator. Using three monolithic actuating units in a symmetrical mechanical arrangement results in reducing the stage size and the assembly errors and improving the structural and thermal stability of the stage. The second issue is the modelling method to obtain an accurate model, which leads to high performance. The accurate static modelling method and compliance factors are selected. In addition, an accurate method for the dynamic modelling based on the work-energy principle is developed.

Using the derived analytical models, an optimization process is conducted to obtain higher performance. Finite Element Analysis (FEA) is used to validate the performance of the proposed stage and the developed modelling method. The proposed stage has a natural frequency of 588.24Hz with 5% deviation and translational and rotational motion ranges of 299.97 μm and 3977 μrad, respectively. Based on the FEA results, the proposed modelling method has the least deviation compared to the other methods, which indicates that it is more accurate than the other methods.

Item Type: Thesis (University of Nottingham only) (PhD)
Supervisors: A. F. Almurib, Haider
Abdalla Abakr, Yousif
Keywords: mechatronics, nano-positioning, automatic control, microelectromechanical system, photolithography
Subjects: T Technology > TJ Mechanical engineering and machinery
Faculties/Schools: UNMC Malaysia Campus > Faculty of Engineering > Department of Electrical and Electronic Engineering
Item ID: 55982
Depositing User: ABDELSEED, SAMAH ABDELSEED TAHA
Date Deposited: 08 Apr 2019 07:46
Last Modified: 07 May 2020 13:00
URI: http://eprints.nottingham.ac.uk/id/eprint/55982

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