Verification of a rigorous 2D model of rough surface scattering

Thomas, M. and Leach, R.K. and Nikolaev, N. and Widjanarko, T. and Senin, N. and Aryan, H. and Coupland, J.M. (2018) Verification of a rigorous 2D model of rough surface scattering. In: European Optical Society Biennial Meeting (EOSAM) 2018, 8-12 October 2018, Delft, Netherlands.

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Abstract

A rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3% of the peak intensity.

Item Type: Conference or Workshop Item (Paper)
RIS ID: https://nottingham-repository.worktribe.com/output/950585
Schools/Departments: University of Nottingham, UK > Faculty of Engineering
Depositing User: Eprints, Support
Date Deposited: 20 Jul 2018 11:09
Last Modified: 04 May 2020 19:49
URI: http://eprints.nottingham.ac.uk/id/eprint/53060

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