Verification of a rigorous 2D model of rough surface scatteringTools Thomas, M. and Leach, R.K. and Nikolaev, N. and Widjanarko, T. and Senin, N. and Aryan, H. and Coupland, J.M. (2018) Verification of a rigorous 2D model of rough surface scattering. In: European Optical Society Biennial Meeting (EOSAM) 2018, 8-12 October 2018, Delft, Netherlands. Full text not available from this repository.AbstractA rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3% of the peak intensity.
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