Lateral error compensation for focus variation microscopy

Pérez, Pablo, Syam, Wahyudin P., Albajez, José Antonio, Santolaria, Jorge and Leach, Richard (2018) Lateral error compensation for focus variation microscopy. In: 18th EUSPEN International Conference & Exhibition, 4–8 June 2018, Venice, Italy.

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Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology for compensation of lateral stage error of a focus variation microscope using an uncalibrated artefact.

Item Type: Conference or Workshop Item (Paper)
Schools/Departments: University of Nottingham, UK > Faculty of Engineering
Depositing User: Eprints, Support
Date Deposited: 23 Mar 2018 11:42
Last Modified: 04 May 2020 19:39

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