Lateral error compensation for focus variation microscopy

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Pérez, Pablo, Syam, Wahyudin P., Albajez, José Antonio, Santolaria, Jorge and Leach, Richard (2018) Lateral error compensation for focus variation microscopy. In: 18th EUSPEN International Conference & Exhibition, 4–8 June 2018, Venice, Italy.

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Abstract

Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology for compensation of lateral stage error of a focus variation microscope using an uncalibrated artefact.

Item Type: Conference or Workshop Item (Paper)
RIS ID: https://nottingham-repository.worktribe.com/output/936578
Schools/Departments: University of Nottingham, UK > Faculty of Engineering
Depositing User: Eprints, Support
Date Deposited: 23 Mar 2018 11:42
Last Modified: 04 May 2020 19:39
URI: https://eprints.nottingham.ac.uk/id/eprint/50625

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