Noise evaluation of a point autofocus surface topography measuring instrument

Maculotti, Giacomo and Feng, Xiaobing and Galetto, Maurizio and Leach, Richard K. (2018) Noise evaluation of a point autofocus surface topography measuring instrument. Measurement Science and Technology, 29 (6). 065008. ISSN 1361-6501

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In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as outlined in draft ISO specification standards by using a calibrated optical flat. The static noise and repeatability of the autofocus sensor are evaluated. The influence of environmental disturbances on the measured surface topography and the built-in software to compensate for such influences are also investigated. The instrument was found to have a measurement noise of approximately 2 nm or, when expressed with the measurement bandwidth, 0.4 nm/√Hz for a single-point measurement.

Item Type: Article
Additional Information: This is an author-created, un-copyedited version of an article accepted for publication/published in Measurement Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at
Schools/Departments: University of Nottingham, UK > Faculty of Engineering > Department of Mechanical, Materials and Manufacturing Engineering
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Depositing User: Feng, Xiaobing
Date Deposited: 12 Mar 2018 13:40
Last Modified: 04 May 2020 19:33

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