Effects of defocus on the transfer function of coherence scanning interferometry

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Su, Rong, Thomas, Matthew, Leach, Richard and Coupland, Jeremy (2017) Effects of defocus on the transfer function of coherence scanning interferometry. Optics Letters, 43 (1). pp. 82-85. ISSN 1539-4794

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Official URL: https://www.osapublishing.org/ol/abstract.cfm?uri=ol-43-1-82

Abstract

Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces both the resolving power of the imaging system and the ability to measure tilted surfaces. This paper extends the linear theory of CSI to consider the effects of defocus on the 3D transfer function and the point spread function in an otherwise ideal CSI instrument. The results are compared with measurements of these functions in a real instrument. This work provides further evidence for the validity of the linear systems theory of CSI.

Item Type:	Article
RIS ID:	https://nottingham-repository.worktribe.com/output/901662
Schools/Departments:	University of Nottingham, UK > Faculty of Engineering
Identification Number:	https://doi.org/10.1364/OL.43.000082
Depositing User:	Eprints, Support
Date Deposited:	20 Nov 2017 11:09
Last Modified:	04 May 2020 19:23
URI:	https://eprints.nottingham.ac.uk/id/eprint/48237

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