Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method

Houston, Paul and Sime, Nathan (2017) Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method. Journal of Physics D: Applied Physics, 50 (29). 295202/1-295202/16. ISSN 1361-6463

[img] PDF - Repository staff only until 3 July 2018. - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
Download (4MB)

Abstract

In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The underlying multi-physics model includes constituent equations for the background gas mass average velocity, gas temperature, electromagnetic field energy and plasma density. The proposed mathematical model is numerically approximated based on exploiting the discontinuous Galerkin finite element method. We demonstrate the practical performance of this computational approach on a variety of CVD reactor geometries for a range of operating conditions.

Item Type: Article
Additional Information: This is an author-created, un-copyedited version of an article accepted for publication in Journal of Physics D: Applied Physics. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at
Keywords: MPA-CVD modelling, Finite element methods, Discontinuous Galerkin methods
Schools/Departments: University of Nottingham, UK > Faculty of Science > School of Mathematical Sciences
Identification Number: 10.1088/1361-6463/aa77dc
Depositing User: Houston, Paul
Date Deposited: 08 Jun 2017 13:05
Last Modified: 13 Oct 2017 00:09
URI: http://eprints.nottingham.ac.uk/id/eprint/43461

Actions (Archive Staff Only)

Edit View Edit View