High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface

Su, Rong and Ekberg, Peter and Leach, Richard K. (2017) High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface. In: 2017 ASPE Topical Meeting: Precision Engineering and Optics: What are the limits of precision, and how to characterize them?, 24-25 April 2017, Tuscon, Arizona, USA.

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Item Type: Conference or Workshop Item (Paper)
Schools/Departments: University of Nottingham, UK > Faculty of Engineering
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Depositing User: Eprints, Support
Date Deposited: 26 Apr 2017 13:00
Last Modified: 05 May 2017 12:48
URI: http://eprints.nottingham.ac.uk/id/eprint/42301

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