Focused ion beam milling of brass for microinjection mould fabrication

Vladov, Nikola, Ratchev, Svetan and Segal, Joel (2011) Focused ion beam milling of brass for microinjection mould fabrication. In: International Conference on Micromanufacturing (ICOMM 2011), 7-10 March 2011, Tokyo, Japan.

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Abstract

In this paper focused ion beam (FIB) milling (sputtering) is demonstrated for the fabrication of brass microinjection moulding inserts which have been previously conventionally milled. It is found that FIB milling of the α phase of the material results in much smoother final surfaces than the β phase. An annealing procedure for minimizing the effects of differential sputtering has also been performed. Further with the help of Scanning Electron Microscopy (SEM) and White Light Interferometry (WLI) measurements the FIB milling yield for 70-30 cartridge brass is determined and analysed. Finally, FIB milling of 5µm square trenches with a flat bottom surface is demonstrated.

Item Type: Conference or Workshop Item (Paper)
RIS ID: https://nottingham-repository.worktribe.com/output/1010227
Keywords: FIB, injection moulding, micro insert, brass, milling
Schools/Departments: University of Nottingham, UK > Faculty of Engineering > Department of Mechanical, Materials and Manufacturing Engineering
Related URLs:
URLURL Type
http://icomm.northwestern.edu/Organisation
Depositing User: Vladov, Nikola
Date Deposited: 11 Aug 2015 13:57
Last Modified: 04 May 2020 20:23
URI: https://eprints.nottingham.ac.uk/id/eprint/29543

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